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Highly c-axis oriented Barium Titanate ferroelectric films deposited on SrTiO3 substrate using an off-axis sputtered conductive oxide layer as bottom electrode
Zhang, Wei; Yuan, Meiling; Wang, Xianyang; Ouyang, Jun
刊名NEW MATERIALS, APPLICATIONS AND PROCESSES, PTS 1-3
2012
卷号399-401页码:926-929
关键词BaTiO3 ferroelectric films preferred orientation RF-magnetron sputtering off-axis sputtering
DOI10.4028/www.scientific.net/AMR.399-401.926
会议名称International Conference on Chemical, Material and Metallurgical Engineering (ICCMME 2011)
URL标识查看原文
会议日期DEC 23-25, 2011
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/5195391
专题山东大学
作者单位Shandong Univ, Key Lab Liquid Solid Struct Evolut & Proc Mat, Engn Ceram Key Lab Shandong Pro
推荐引用方式
GB/T 7714
Zhang, Wei,Yuan, Meiling,Wang, Xianyang,et al. Highly c-axis oriented Barium Titanate ferroelectric films deposited on SrTiO3 substrate using an off-axis sputtered conductive oxide layer as bottom electrode[J]. NEW MATERIALS, APPLICATIONS AND PROCESSES, PTS 1-3,2012,399-401:926-929.
APA Zhang, Wei,Yuan, Meiling,Wang, Xianyang,&Ouyang, Jun.(2012).Highly c-axis oriented Barium Titanate ferroelectric films deposited on SrTiO3 substrate using an off-axis sputtered conductive oxide layer as bottom electrode.NEW MATERIALS, APPLICATIONS AND PROCESSES, PTS 1-3,399-401,926-929.
MLA Zhang, Wei,et al."Highly c-axis oriented Barium Titanate ferroelectric films deposited on SrTiO3 substrate using an off-axis sputtered conductive oxide layer as bottom electrode".NEW MATERIALS, APPLICATIONS AND PROCESSES, PTS 1-3 399-401(2012):926-929.
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