Highly c-axis oriented Barium Titanate ferroelectric films deposited on SrTiO3 substrate using an off-axis sputtered conductive oxide layer as bottom electrode | |
Zhang, Wei; Yuan, Meiling; Wang, Xianyang; Ouyang, Jun | |
刊名 | NEW MATERIALS, APPLICATIONS AND PROCESSES, PTS 1-3 |
2012 | |
卷号 | 399-401页码:926-929 |
关键词 | BaTiO3 ferroelectric films preferred orientation RF-magnetron sputtering off-axis sputtering |
DOI | 10.4028/www.scientific.net/AMR.399-401.926 |
会议名称 | International Conference on Chemical, Material and Metallurgical Engineering (ICCMME 2011) |
URL标识 | 查看原文 |
会议日期 | DEC 23-25, 2011 |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/5195391 |
专题 | 山东大学 |
作者单位 | Shandong Univ, Key Lab Liquid Solid Struct Evolut & Proc Mat, Engn Ceram Key Lab Shandong Pro |
推荐引用方式 GB/T 7714 | Zhang, Wei,Yuan, Meiling,Wang, Xianyang,et al. Highly c-axis oriented Barium Titanate ferroelectric films deposited on SrTiO3 substrate using an off-axis sputtered conductive oxide layer as bottom electrode[J]. NEW MATERIALS, APPLICATIONS AND PROCESSES, PTS 1-3,2012,399-401:926-929. |
APA | Zhang, Wei,Yuan, Meiling,Wang, Xianyang,&Ouyang, Jun.(2012).Highly c-axis oriented Barium Titanate ferroelectric films deposited on SrTiO3 substrate using an off-axis sputtered conductive oxide layer as bottom electrode.NEW MATERIALS, APPLICATIONS AND PROCESSES, PTS 1-3,399-401,926-929. |
MLA | Zhang, Wei,et al."Highly c-axis oriented Barium Titanate ferroelectric films deposited on SrTiO3 substrate using an off-axis sputtered conductive oxide layer as bottom electrode".NEW MATERIALS, APPLICATIONS AND PROCESSES, PTS 1-3 399-401(2012):926-929. |
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