Convex corners undercutting and rhombus compensation in KOH with and without IPA solution on (110) silicon

	Convex corners undercutting and rhombus compensation in KOH with and without IPA solution on (110) silicon
	Jia C. P. ; Dong W. ; Liu C. X. ; Zhang X. D. ; Zhou J. R. ; Zhong Z. C. ; Xue H. L. ; Zang H. D. ; Xu B. K. ; Chen W. Y.
刊名	Microelectronics Journal
	2006
卷号	37 期号:11 页码:1297-1301
ISSN号	0026-2692
其他题名	论文其他题名
合作状况	合作性质
收录类别	SCI ; EI
语种	英语
公开日期	2012-10-21
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/26689]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Jia C. P.,Dong W.,Liu C. X.,et al. Convex corners undercutting and rhombus compensation in KOH with and without IPA solution on (110) silicon[J]. Microelectronics Journal,2006,37(11):1297-1301.
APA	Jia C. P..,Dong W..,Liu C. X..,Zhang X. D..,Zhou J. R..,...&Chen W. Y..(2006).Convex corners undercutting and rhombus compensation in KOH with and without IPA solution on (110) silicon.Microelectronics Journal,37(11),1297-1301.
MLA	Jia C. P.,et al."Convex corners undercutting and rhombus compensation in KOH with and without IPA solution on (110) silicon".Microelectronics Journal 37.11(2006):1297-1301.