| Research of Magnetron Sputtering Plasma Characteristics and Load Matching Based on Pulse Bias | |
| Huang Xiping; Zhao Suxia; Sun Qiang; Chen Guitao | |
| 2012 | |
| 会议名称 | 2012 ASIA-PACIFIC POWER AND ENERGY ENGINEERING CONFERENCE (APPEEC) |
| 会议日期 | 2012-01-01 |
| 关键词 | Magnetron sputtering power Pulse bias Load characteristic Load matching |
| URL标识 | 查看原文 |
| WOS记录号 | WOS:000312728702205 |
| 内容类型 | 会议论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/5023743 |
| 专题 | 西安理工大学 |
| 推荐引用方式 GB/T 7714 | Huang Xiping,Zhao Suxia,Sun Qiang,et al. Research of Magnetron Sputtering Plasma Characteristics and Load Matching Based on Pulse Bias[C]. 见:2012 ASIA-PACIFIC POWER AND ENERGY ENGINEERING CONFERENCE (APPEEC). 2012-01-01. |
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