Numerical and experimental study on fabrication of microstructure array with topographical gradient via through-mask EMM | |
Wang, Quandai; Xiao, Jiming; Lü, Yanjun | |
2012 | |
会议名称 | International Conference on Frontiers of Nanoscience and Technology (ICFNST 2012) |
会议日期 | 2012-07-26 |
会议地点 | Hong Kong, PEOPLES R CHINA |
关键词 | Through-mask electrochemical micromachining Topographical gradient Microstructure array Numerical simulation |
页码 | 254-258 |
会议录 | FRONTIER OF NANOSCIENCE AND TECHNOLOGY II
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URL标识 | 查看原文 |
WOS记录号 | WOS:000312276500056 |
内容类型 | 会议论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/5023076 |
专题 | 西安理工大学 |
推荐引用方式 GB/T 7714 | Wang, Quandai,Xiao, Jiming,Lü, Yanjun. Numerical and experimental study on fabrication of microstructure array with topographical gradient via through-mask EMM[C]. 见:International Conference on Frontiers of Nanoscience and Technology (ICFNST 2012). Hong Kong, PEOPLES R CHINA. 2012-07-26. |
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