| Numerical and experimental study on fabrication of microstructure array with topographical gradient via through-mask EMM | |
| Wang, Quandai; Xiao, Jiming; Lü, Yanjun | |
| 2012 | |
| 会议名称 | International Conference on Frontiers of Nanoscience and Technology (ICFNST 2012) |
| 会议日期 | 2012-07-26 |
| 会议地点 | Hong Kong, PEOPLES R CHINA |
| 关键词 | Through-mask electrochemical micromachining Topographical gradient Microstructure array Numerical simulation |
| 页码 | 254-258 |
| 会议录 | FRONTIER OF NANOSCIENCE AND TECHNOLOGY II
 |
| URL标识 | 查看原文 |
| WOS记录号 | WOS:000312276500056 |
| 内容类型 | 会议论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/5023076 |
| 专题 | 西安理工大学 |
| 推荐引用方式 GB/T 7714 | Wang, Quandai,Xiao, Jiming,Lü, Yanjun. Numerical and experimental study on fabrication of microstructure array with topographical gradient via through-mask EMM[C]. 见:International Conference on Frontiers of Nanoscience and Technology (ICFNST 2012). Hong Kong, PEOPLES R CHINA. 2012-07-26. |
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