| Characterization of AlN thin film prepared by reactive sputtering | |
| Zang, Yuan; Li, Lianbi; Ren, Zhanqiang; Cao, Ling; Zhang, Yan | |
| 2016 | |
| 卷号 | 48页码:1029-1032 |
| 关键词 | AlN reactive sputtering refractive index optical band gap |
| ISSN号 | 0142-2421 |
| DOI | 10.1002/sia.6018 |
| URL标识 | 查看原文 |
| WOS记录号 | WOS:000383753200001 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/4985251 |
| 专题 | 西安理工大学 |
| 推荐引用方式 GB/T 7714 | Zang, Yuan,Li, Lianbi,Ren, Zhanqiang,et al. Characterization of AlN thin film prepared by reactive sputtering[J],2016,48:1029-1032. |
| APA | Zang, Yuan,Li, Lianbi,Ren, Zhanqiang,Cao, Ling,&Zhang, Yan.(2016).Characterization of AlN thin film prepared by reactive sputtering.,48,1029-1032. |
| MLA | Zang, Yuan,et al."Characterization of AlN thin film prepared by reactive sputtering".48(2016):1029-1032. |
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