Parameter-estimation of a spherical top inductively-coupled plasma source with global-model

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	Parameter-estimation of a spherical top inductively-coupled plasma source with global-model
	Wu HM(吴汉明); Li M(李明); Chen YM(陈允明); Wu CK(吴承康)
刊名	Chinese Physics Letters
	1995
卷号	12 期号:5 页码:281-284
ISSN号	0256-307X
通讯作者	WU, BM (reprint author), ACAD SINICA,INST MECH,BEIJING 100080,PEOPLES R CHINA.
中文摘要	Using spatially averaged global model, we succeed in obtaining some plasma parameters for a low pressure inductively coupled plasma source of our laboratory. As far as the global balance is concerned, the models can give reasonable results of the parameters, such as the global electron temperature and the ion impacting energy, etc. It is found that the ion flow is hardly affected by the neutral gas pressure. Finally, the magnetic effects are calculated by means of the method. The magnetic field can play an important role to increase plasma density and ion current.
类目[WOS]	Physics, Multidisciplinary
研究领域[WOS]	Physics
收录类别	SCI
语种	英语
WOS记录号	WOS:A1995RD43100007
公开日期	2009-08-03 ; 2010-08-20
内容类型	期刊论文
源URL	[http://dspace.imech.ac.cn/handle/311007/39232]
专题	力学研究所_力学所知识产出(1956-2008)
推荐引用方式 GB/T 7714	Wu HM,Li M,Chen YM,et al. Parameter-estimation of a spherical top inductively-coupled plasma source with global-model[J]. Chinese Physics Letters,1995,12(5):281-284.
APA	吴汉明,李明,陈允明,&吴承康.(1995).Parameter-estimation of a spherical top inductively-coupled plasma source with global-model.Chinese Physics Letters,12(5),281-284.
MLA	吴汉明,et al."Parameter-estimation of a spherical top inductively-coupled plasma source with global-model".Chinese Physics Letters 12.5(1995):281-284.