Alignment measurement method for imprint lithography using moire fringe pattern | |
Shao, Jinyou; Liu, Hongzhong; Ding, Yucheng; Wang, Li; Lu, Binghen | |
刊名 | OPTICAL ENGINEERING
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2008 | |
卷号 | 47期号:11页码:7 |
关键词 | imprint lithography moire fringe alignment measurement |
ISSN号 | 0091-3286 |
DOI | 10.1117/1.3028350 |
URL标识 | 查看原文 |
WOS记录号 | WOS:000261267800007 |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/4864848 |
专题 | 西安交通大学 |
推荐引用方式 GB/T 7714 | Shao, Jinyou,Liu, Hongzhong,Ding, Yucheng,et al. Alignment measurement method for imprint lithography using moire fringe pattern[J]. OPTICAL ENGINEERING,2008,47(11):7. |
APA | Shao, Jinyou,Liu, Hongzhong,Ding, Yucheng,Wang, Li,&Lu, Binghen.(2008).Alignment measurement method for imprint lithography using moire fringe pattern.OPTICAL ENGINEERING,47(11),7. |
MLA | Shao, Jinyou,et al."Alignment measurement method for imprint lithography using moire fringe pattern".OPTICAL ENGINEERING 47.11(2008):7. |
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