Single-shot parallel four-step phase shifting using on-axis Fizeau interferometry

CORC > 西安光学精密机械研究所 > 中国科学院西安光学精密机械研究所 > 瞬态光学技术国家重点实验室

	Single-shot parallel four-step phase shifting using on-axis Fizeau interferometry
	Abdelsalam, D. G.1,2,3; Yao, Baoli1 ; Gao, Peng 1; Min, Junwei1 ; Guo, Rongli 1
刊名	applied optics
	2012-07-10
卷号	51 期号:20 页码:4891-4895
ISSN号	1559-128x
产权排序	1
合作状况	国际
英文摘要	the purposes of the paper are threefold: (1) to show the possibility to perform parallel phase-shifting fizeau interferometry by using a quarter waveplate with high flatness as a reference, (2) to present a comparative study between the phase-shifting algorithm and the off-axis geometry in surface micro-topography measurement, and (3) to show the advantages of using the proposed common path fizeau interferometry over the quasi-common path michelson interferometry in terms of accuracy in measurement. the compelling advantage of the proposed parallel phase-shifting fizeau interferometric technique is the long-term stability that leads to measuring objects with a high degree of accuracy. (c) 2012 optical society of america
学科主题	optics
WOS标题词	science & technology ; physical sciences
类目[WOS]	optics
研究领域[WOS]	optics
关键词[WOS]	digital holography ; polarizing separation ; pair
收录类别	SCI ; EI
语种	英语
WOS记录号	WOS:000306291100042
公开日期	2012-09-04
内容类型	期刊论文
源URL	[http://ir.opt.ac.cn/handle/181661/20283]
专题	西安光学精密机械研究所_瞬态光学技术国家重点实验室
作者单位	1.Chinese Acad Sci, Xian Inst Opt & Precis Mech, State Key Lab Transient Opt & Photon, Xian 710119, Peoples R China 2.Natl Inst Stand, Engn & Surface Metrol Lab, El Haram, El Giza, Egypt 3.Chonbuk Natl Univ, Div Mech Syst Engn, Jeonju 561756, South Korea
推荐引用方式 GB/T 7714	Abdelsalam, D. G.,Yao, Baoli,Gao, Peng,et al. Single-shot parallel four-step phase shifting using on-axis Fizeau interferometry[J]. applied optics,2012,51(20):4891-4895.
APA	Abdelsalam, D. G.,Yao, Baoli,Gao, Peng,Min, Junwei,&Guo, Rongli.(2012).Single-shot parallel four-step phase shifting using on-axis Fizeau interferometry.applied optics,51(20),4891-4895.
MLA	Abdelsalam, D. G.,et al."Single-shot parallel four-step phase shifting using on-axis Fizeau interferometry".applied optics 51.20(2012):4891-4895.