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	Modeling of high frequency atmospheric pressure Ar/H-2/SiH4 glow discharges
	Zhuang, Juan; Sun, Jizhong; Wang, Dezhen; Sang, Chaofeng; Liu, Liying
刊名	Joint Meeting of the 10th Asia-Pacific Conference on Plasma Science and Technology (APCPST 2010)/153rd Symposium on Plasma Science for Materials (SPSM 2010)
	2011
卷号	519页码:7014-7019
关键词	Plasma Numerical simulation Atmospheric pressure Mode
ISSN号	0040-6090
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/4843392
专题	大连理工大学
作者单位	Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116024, Peoples R China.
推荐引用方式 GB/T 7714	Zhuang, Juan,Sun, Jizhong,Wang, Dezhen,et al. Modeling of high frequency atmospheric pressure Ar/H-2/SiH4 glow discharges[J]. Joint Meeting of the 10th Asia-Pacific Conference on Plasma Science and Technology (APCPST 2010)/153rd Symposium on Plasma Science for Materials (SPSM 2010),2011,519:7014-7019.
APA	Zhuang, Juan,Sun, Jizhong,Wang, Dezhen,Sang, Chaofeng,&Liu, Liying.(2011).Modeling of high frequency atmospheric pressure Ar/H-2/SiH4 glow discharges.Joint Meeting of the 10th Asia-Pacific Conference on Plasma Science and Technology (APCPST 2010)/153rd Symposium on Plasma Science for Materials (SPSM 2010),519,7014-7019.
MLA	Zhuang, Juan,et al."Modeling of high frequency atmospheric pressure Ar/H-2/SiH4 glow discharges".Joint Meeting of the 10th Asia-Pacific Conference on Plasma Science and Technology (APCPST 2010)/153rd Symposium on Plasma Science for Materials (SPSM 2010) 519(2011):7014-7019.

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