| Preparation of p-type microcrystal Si:H films by ECR-PECVD | |
| Zhang Xue-yu; Wu Ai-min; Yue Hong-yun; Hu Juan; Wen Li-shi | |
| 2011 | |
| 会议名称 | 7th International Forum on Advanced Material Science and Technology |
| 会议日期 | 2010-06-26 |
| 会议地点 | Dalian, PEOPLES R CHINA |
| 关键词 | P-type doping mu c-Si:H film ECR-PECVD Hall |
| 页码 | 1287-1290 |
| 会议录 | 7th International Forum on Advanced Material Science and Technology
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| URL标识 | 查看原文 |
| 内容类型 | 会议论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/4841966 |
| 专题 | 大连理工大学 |
| 作者单位 | Dalian Univ Technol, Sch Mat Sci & Engn, Dalian 116024, Peoples R China. |
| 推荐引用方式 GB/T 7714 | Zhang Xue-yu,Wu Ai-min,Yue Hong-yun,et al. Preparation of p-type microcrystal Si:H films by ECR-PECVD[C]. 见:7th International Forum on Advanced Material Science and Technology. Dalian, PEOPLES R CHINA. 2010-06-26. |
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