| Diagnostics of Parameters by Optical Emission Spectroscopy and Langmuir Probe in Mixtures (SiH4/C2H4/Ar) Radio-Frequency Discharge | |
| Wu Jing; Zhang Pengyun; Sun Jizhong; Yao Lieming; Duan Xuru | |
| 刊名 | PLASMA SCIENCE & TECHNOLOGY
 |
| 2011 | |
| 卷号 | 13页码:561-566 |
| 关键词 | RF discharge optical emission spectroscopy Langmuir probe |
| ISSN号 | 1009-0630 |
| URL标识 | 查看原文 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/4840801 |
| 专题 | 大连理工大学 |
| 作者单位 | 1.Univ Elect Sci & Technol China, Sch Phys Elect, Chengdu 610054, Peoples R China. 2.SW Inst Phys, Ctr Fus Sci, Chengdu 610054, Peoples R China. 3.Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116024, Peoples R China. 4.Univ Elect Sci & Technol China, Sch Phys Elect, Chengdu 610054, Peoples R China. 5.SW Inst Phys, Ctr Fus Sci, Chengdu 610054, Peoples R China. |
| 推荐引用方式 GB/T 7714 | Wu Jing,Zhang Pengyun,Sun Jizhong,et al. Diagnostics of Parameters by Optical Emission Spectroscopy and Langmuir Probe in Mixtures (SiH4/C2H4/Ar) Radio-Frequency Discharge[J]. PLASMA SCIENCE & TECHNOLOGY,2011,13:561-566. |
| APA | Wu Jing,Zhang Pengyun,Sun Jizhong,Yao Lieming,&Duan Xuru.(2011).Diagnostics of Parameters by Optical Emission Spectroscopy and Langmuir Probe in Mixtures (SiH4/C2H4/Ar) Radio-Frequency Discharge.PLASMA SCIENCE & TECHNOLOGY,13,561-566. |
| MLA | Wu Jing,et al."Diagnostics of Parameters by Optical Emission Spectroscopy and Langmuir Probe in Mixtures (SiH4/C2H4/Ar) Radio-Frequency Discharge".PLASMA SCIENCE & TECHNOLOGY 13(2011):561-566. |
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