QQ客服 官方微博 反馈留言

	Implementation of autofocus in alignment system for layered imprint fabrication
	Wang, Quandai; Duan, Yugang; Lu, Bingheng; Xiang, Jiawei; Yang, Lianfa
刊名	Transactions of Tianjin University
	2009
卷号	15期号:4页码:294-299
关键词	Algorithm efficiency Auto-focus algorithm Computation efficiency Imprint lithography Interested regions Layered fabrication Layered fabrication process Modified algorithms
ISSN号	1006-4982
DOI	10.1007/s12209-009-0052-z
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/4840325
专题	西安交通大学
推荐引用方式 GB/T 7714	Wang, Quandai,Duan, Yugang,Lu, Bingheng,et al. Implementation of autofocus in alignment system for layered imprint fabrication[J]. Transactions of Tianjin University,2009,15(4):294-299.
APA	Wang, Quandai,Duan, Yugang,Lu, Bingheng,Xiang, Jiawei,&Yang, Lianfa.(2009).Implementation of autofocus in alignment system for layered imprint fabrication.Transactions of Tianjin University,15(4),294-299.
MLA	Wang, Quandai,et al."Implementation of autofocus in alignment system for layered imprint fabrication".Transactions of Tianjin University 15.4(2009):294-299.

个性服务

查看访问统计

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。