Research on the cast molding process for high quality PDMS molds | |
Ye, Xiangdong; Liu, Hongzhong; Ding, Yucheng; Li, Hansong; Lu, Bingheng | |
刊名 | MICROELECTRONIC ENGINEERING
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2009 | |
卷号 | 86期号:3页码:310-313 |
关键词 | PDMS mold Vacuum degree Nanoimprint Curing temperature Cast molding process |
ISSN号 | 0167-9317 |
DOI | 10.1016/j.mee.2008.10.011 |
URL标识 | 查看原文 |
WOS记录号 | WOS:000264743100021 |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/4839925 |
专题 | 西安交通大学 |
推荐引用方式 GB/T 7714 | Ye, Xiangdong,Liu, Hongzhong,Ding, Yucheng,et al. Research on the cast molding process for high quality PDMS molds[J]. MICROELECTRONIC ENGINEERING,2009,86(3):310-313. |
APA | Ye, Xiangdong,Liu, Hongzhong,Ding, Yucheng,Li, Hansong,&Lu, Bingheng.(2009).Research on the cast molding process for high quality PDMS molds.MICROELECTRONIC ENGINEERING,86(3),310-313. |
MLA | Ye, Xiangdong,et al."Research on the cast molding process for high quality PDMS molds".MICROELECTRONIC ENGINEERING 86.3(2009):310-313. |
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