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	Research on the cast molding process for high quality PDMS molds
	Ye, Xiangdong; Liu, Hongzhong; Ding, Yucheng; Li, Hansong; Lu, Bingheng
刊名	MICROELECTRONIC ENGINEERING
	2009
卷号	86期号:3页码:310-313
关键词	PDMS mold Vacuum degree Nanoimprint Curing temperature Cast molding process
ISSN号	0167-9317
DOI	10.1016/j.mee.2008.10.011
URL标识	查看原文
WOS记录号	WOS:000264743100021
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/4839925
专题	西安交通大学
推荐引用方式 GB/T 7714	Ye, Xiangdong,Liu, Hongzhong,Ding, Yucheng,et al. Research on the cast molding process for high quality PDMS molds[J]. MICROELECTRONIC ENGINEERING,2009,86(3):310-313.
APA	Ye, Xiangdong,Liu, Hongzhong,Ding, Yucheng,Li, Hansong,&Lu, Bingheng.(2009).Research on the cast molding process for high quality PDMS molds.MICROELECTRONIC ENGINEERING,86(3),310-313.
MLA	Ye, Xiangdong,et al."Research on the cast molding process for high quality PDMS molds".MICROELECTRONIC ENGINEERING 86.3(2009):310-313.

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