| A three-axial micro-force sensor based on MEMS technology | |
| Wang, Weizhong; Zhao, Yulong; Lin, Qijing; Yuan, Guoying | |
| 刊名 | INTERNATIONAL JOURNAL OF APPLIED ELECTROMAGNETICS AND MECHANICS
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| 2010 | |
| 卷号 | 33期号:3-4页码:991-999 |
| 关键词 | probe ANSYS Three-axial MEMS micro-force sensor |
| ISSN号 | 1383-5416 |
| DOI | 10.3233/JAE-2010-1212 |
| URL标识 | 查看原文 |
| WOS记录号 | WOS:000283661600017 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/4815168 |
| 专题 | 西安交通大学 |
| 推荐引用方式 GB/T 7714 | Wang, Weizhong,Zhao, Yulong,Lin, Qijing,et al. A three-axial micro-force sensor based on MEMS technology[J]. INTERNATIONAL JOURNAL OF APPLIED ELECTROMAGNETICS AND MECHANICS,2010,33(3-4):991-999. |
| APA | Wang, Weizhong,Zhao, Yulong,Lin, Qijing,&Yuan, Guoying.(2010).A three-axial micro-force sensor based on MEMS technology.INTERNATIONAL JOURNAL OF APPLIED ELECTROMAGNETICS AND MECHANICS,33(3-4),991-999. |
| MLA | Wang, Weizhong,et al."A three-axial micro-force sensor based on MEMS technology".INTERNATIONAL JOURNAL OF APPLIED ELECTROMAGNETICS AND MECHANICS 33.3-4(2010):991-999. |
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