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The crystallization character of W-Cu thin films at the early stage of deposition
Tianle Xie; Licai Fu; Baolong Gao; Jiajun Zhu; Wulin Yang; Deyi Li; Lingping Zhou
刊名Thin Solid Films
2019
卷号Vol.690页码:137555
关键词Tungsten copper Thin films Amorphous Crystallization Early stage of deposition, sputtering
ISSN号0040-6090
URL标识查看原文
公开日期[db:dc_date_available]
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/4748048
专题湖南大学
作者单位1.a College of Material Science and Engineering, Hunan University, Changsha 410082, China
2.Key Laboratory of Spray Deposition Technology of Hunan Province, Changsha 410082, China
推荐引用方式
GB/T 7714
Tianle Xie,Licai Fu,Baolong Gao,et al. The crystallization character of W-Cu thin films at the early stage of deposition[J]. Thin Solid Films,2019,Vol.690:137555.
APA Tianle Xie.,Licai Fu.,Baolong Gao.,Jiajun Zhu.,Wulin Yang.,...&Lingping Zhou.(2019).The crystallization character of W-Cu thin films at the early stage of deposition.Thin Solid Films,Vol.690,137555.
MLA Tianle Xie,et al."The crystallization character of W-Cu thin films at the early stage of deposition".Thin Solid Films Vol.690(2019):137555.
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