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	Post annealing effects on low temperature deposited Mn-Co-Ni-O films by radio frequency magnetron sputtering.
	Yin, Yiming; Wu, Jing; Zhou, Wei; Jiang, Lin; Huang, Zhiming
刊名	Materials Letters
	2019
卷号	Vol.235页码:172-175
关键词	AMORPHOUS alloys *RADIO frequency *MAGNETRON sputtering *THIN films *SILICON
ISSN号	0167-577X
URL标识	查看原文
公开日期	[db:dc_date_available]
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/4735851
专题	湖南大学
作者单位	State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China
推荐引用方式 GB/T 7714	Yin, Yiming,Wu, Jing,Zhou, Wei,et al. Post annealing effects on low temperature deposited Mn-Co-Ni-O films by radio frequency magnetron sputtering.[J]. Materials Letters,2019,Vol.235:172-175.
APA	Yin, Yiming,Wu, Jing,Zhou, Wei,Jiang, Lin,&Huang, Zhiming.(2019).Post annealing effects on low temperature deposited Mn-Co-Ni-O films by radio frequency magnetron sputtering..Materials Letters,Vol.235,172-175.
MLA	Yin, Yiming,et al."Post annealing effects on low temperature deposited Mn-Co-Ni-O films by radio frequency magnetron sputtering.".Materials Letters Vol.235(2019):172-175.

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