Post annealing effects on low temperature deposited Mn-Co-Ni-O films by radio frequency magnetron sputtering. | |
Yin, Yiming; Wu, Jing; Zhou, Wei; Jiang, Lin; Huang, Zhiming | |
刊名 | Materials Letters
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2019 | |
卷号 | Vol.235页码:172-175 |
关键词 | AMORPHOUS alloys *RADIO frequency *MAGNETRON sputtering *THIN films *SILICON |
ISSN号 | 0167-577X |
URL标识 | 查看原文 |
公开日期 | [db:dc_date_available] |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/4735851 |
专题 | 湖南大学 |
作者单位 | State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China |
推荐引用方式 GB/T 7714 | Yin, Yiming,Wu, Jing,Zhou, Wei,et al. Post annealing effects on low temperature deposited Mn-Co-Ni-O films by radio frequency magnetron sputtering.[J]. Materials Letters,2019,Vol.235:172-175. |
APA | Yin, Yiming,Wu, Jing,Zhou, Wei,Jiang, Lin,&Huang, Zhiming.(2019).Post annealing effects on low temperature deposited Mn-Co-Ni-O films by radio frequency magnetron sputtering..Materials Letters,Vol.235,172-175. |
MLA | Yin, Yiming,et al."Post annealing effects on low temperature deposited Mn-Co-Ni-O films by radio frequency magnetron sputtering.".Materials Letters Vol.235(2019):172-175. |
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