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	Simulation of cmp process based on mixed elastohydrodynamic lubrication model with layered elastic theory
	Zhou, P.; Kang, R.; Jin, Z.; Guo, D.
刊名	Advanced Materials Research
	2012
卷号	565页码:330-335
关键词	Chemical mechanical polishing Elastohydrodynamic Lubrication Layered elastic theory Rough surface Contact mechanic
ISSN号	9783037854679
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/4672320
专题	大连理工大学
作者单位	Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116024, China
推荐引用方式 GB/T 7714	Zhou, P.,Kang, R.,Jin, Z.,et al. Simulation of cmp process based on mixed elastohydrodynamic lubrication model with layered elastic theory[J]. Advanced Materials Research,2012,565:330-335.
APA	Zhou, P.,Kang, R.,Jin, Z.,&Guo, D..(2012).Simulation of cmp process based on mixed elastohydrodynamic lubrication model with layered elastic theory.Advanced Materials Research,565,330-335.
MLA	Zhou, P.,et al."Simulation of cmp process based on mixed elastohydrodynamic lubrication model with layered elastic theory".Advanced Materials Research 565(2012):330-335.

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