Simulation of cmp process based on mixed elastohydrodynamic lubrication model with layered elastic theory | |
Zhou, P.; Kang, R.; Jin, Z.; Guo, D. | |
刊名 | Advanced Materials Research
![]() |
2012 | |
卷号 | 565页码:330-335 |
关键词 | Chemical mechanical polishing Elastohydrodynamic Lubrication Layered elastic theory Rough surface Contact mechanic |
ISSN号 | 9783037854679 |
URL标识 | 查看原文 |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/4672320 |
专题 | 大连理工大学 |
作者单位 | Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116024, China |
推荐引用方式 GB/T 7714 | Zhou, P.,Kang, R.,Jin, Z.,et al. Simulation of cmp process based on mixed elastohydrodynamic lubrication model with layered elastic theory[J]. Advanced Materials Research,2012,565:330-335. |
APA | Zhou, P.,Kang, R.,Jin, Z.,&Guo, D..(2012).Simulation of cmp process based on mixed elastohydrodynamic lubrication model with layered elastic theory.Advanced Materials Research,565,330-335. |
MLA | Zhou, P.,et al."Simulation of cmp process based on mixed elastohydrodynamic lubrication model with layered elastic theory".Advanced Materials Research 565(2012):330-335. |
个性服务 |
查看访问统计 |
相关权益政策 |
暂无数据 |
收藏/分享 |
除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。
修改评论