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	Fabrication of planar nanofluidic channels in thermoplastic polymers by O-2 plasma etching
	Liu, Junshan; Qiao, Hongchao; Xu, Zheng; Liu, Chong; Wang, Junyao; Du, Liqun; Zhang, Xi; Wang, Liding
刊名	MICRO & NANO LETTERS
	2012
卷号	7页码:159-162
ISSN号	1750-0443
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/4667187
专题	大连理工大学
作者单位	1.Dalian Univ Technol, Key Lab Precis & Nontradit Machining Technol, Minist Educ, Dalian 116024, Peoples R China. 2.Dalian Univ Technol, Key Lab Micro Nano Technol & Syst Liaoning Prov, Dalian 116024, Peoples R China. 3.Dalian Univ Technol, Key Lab Precis & Nontradit Machining Technol, Minist Educ, Dalian 116024, Peoples R China.
推荐引用方式 GB/T 7714	Liu, Junshan,Qiao, Hongchao,Xu, Zheng,et al. Fabrication of planar nanofluidic channels in thermoplastic polymers by O-2 plasma etching[J]. MICRO & NANO LETTERS,2012,7:159-162.
APA	Liu, Junshan.,Qiao, Hongchao.,Xu, Zheng.,Liu, Chong.,Wang, Junyao.,...&Wang, Liding.(2012).Fabrication of planar nanofluidic channels in thermoplastic polymers by O-2 plasma etching.MICRO & NANO LETTERS,7,159-162.
MLA	Liu, Junshan,et al."Fabrication of planar nanofluidic channels in thermoplastic polymers by O-2 plasma etching".MICRO & NANO LETTERS 7(2012):159-162.

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