| Near-field microscopy inspection of nano scratch defects on the monocrystalline silicon surface | |
| Ying Yan; Yonghao Wang; Ping Zhou; Ning Huang; Dongming Guo | |
| 刊名 | Precision Engineering
 |
| 2019 | |
| 关键词 | s-SNOM surface defects micro crack |
| ISSN号 | 0141-6359 |
| URL标识 | 查看原文 |
| 公开日期 | [db:dc_date_available] |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/4611710 |
| 专题 | 湖南大学 |
| 作者单位 | Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116024, China |
| 推荐引用方式 GB/T 7714 | Ying Yan,Yonghao Wang,Ping Zhou,et al. Near-field microscopy inspection of nano scratch defects on the monocrystalline silicon surface[J]. Precision Engineering,2019. |
| APA | Ying Yan,Yonghao Wang,Ping Zhou,Ning Huang,&Dongming Guo.(2019).Near-field microscopy inspection of nano scratch defects on the monocrystalline silicon surface.Precision Engineering. |
| MLA | Ying Yan,et al."Near-field microscopy inspection of nano scratch defects on the monocrystalline silicon surface".Precision Engineering (2019). |
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