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	Numerical Simulations on Nanosecond Pulse Laser Annealing in Vertical Polycrystalline Si Macaroni Channel
	Ma, Fushuai; Zhan, Xuepeng; Li, Yuan; Chen, Jiezhi
刊名	2018 14th IEEE International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2018 - Proceedings
	2018
DOI	10.1109/ICSICT.2018.8565816
会议名称	14th IEEE International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2018
URL标识	查看原文
会议日期	31 October 2018 through 3 November 2018
公开日期	[db:dc_date_available]
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/4569395
专题	山东大学
作者单位	1.School of Information Science and Engineering, Shandong University, Qingdao 2.266237, China
推荐引用方式 GB/T 7714	Ma, Fushuai,Zhan, Xuepeng,Li, Yuan,et al. Numerical Simulations on Nanosecond Pulse Laser Annealing in Vertical Polycrystalline Si Macaroni Channel[J]. 2018 14th IEEE International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2018 - Proceedings,2018.
APA	Ma, Fushuai,Zhan, Xuepeng,Li, Yuan,&Chen, Jiezhi.(2018).Numerical Simulations on Nanosecond Pulse Laser Annealing in Vertical Polycrystalline Si Macaroni Channel.2018 14th IEEE International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2018 - Proceedings.
MLA	Ma, Fushuai,et al."Numerical Simulations on Nanosecond Pulse Laser Annealing in Vertical Polycrystalline Si Macaroni Channel".2018 14th IEEE International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2018 - Proceedings (2018).

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