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	Large piezoelectricity on Si from highly (001)-oriented PZT thick films via a CMOS-compatible sputtering/RTP process
	Wang Y.; Cheng H.; Yan J.; Chen N.; Yan P.; Yang F.; Ouyang J.
刊名	Materialia
	2019
卷号	5
关键词	CMOS-Si Lead zirconate titanate (PZT) ferroelectric film Magnetron sputtering Micro-electro-mechanical systems (MEMS) Piezoelectric Rapid thermal processing (RTP)
DOI	10.1016/j.mtla.2019.100228
URL标识	查看原文
公开日期	[db:dc_date_available]
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/4562003
专题	山东大学
作者单位	Key Laboratory for Liquid-Solid Structure Evolution and Processing of Materials , School of Materials Science and Eng
推荐引用方式 GB/T 7714	Wang Y.,Cheng H.,Yan J.,et al. Large piezoelectricity on Si from highly (001)-oriented PZT thick films via a CMOS-compatible sputtering/RTP process[J]. Materialia,2019,5.
APA	Wang Y..,Cheng H..,Yan J..,Chen N..,Yan P..,...&Ouyang J..(2019).Large piezoelectricity on Si from highly (001)-oriented PZT thick films via a CMOS-compatible sputtering/RTP process.Materialia,5.
MLA	Wang Y.,et al."Large piezoelectricity on Si from highly (001)-oriented PZT thick films via a CMOS-compatible sputtering/RTP process".Materialia 5(2019).

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