Investigation of vacuum performances of TiZrV coated pipe

CORC > 上海应用物理研究所 > 中国科学院上海应用物理研究所 > 中科院上海应用物理研究所2011-2017年

	Investigation of vacuum performances of TiZrV coated pipe
	Zhang Haiou ; Dai Dongdong ; Tang Ziyi ; Zhang Jidong ; Shao Bin ; He Suixia
刊名	NUCLEAR SCIENCE AND TECHNIQUES
	2011
卷号	22 期号:6 页码:326
ISSN号	1001-8042
英文摘要	Some metal compounds called as Non-Evaporable-Getter have been widely used to improve vacuum system performance of accelerator facility. In this paper, a TiZrV film on the surface of stainless steel vacuum pipe is made by direct current magnetron sputtering, and its vacuum performance is experimentally studied. Our results show that the TiZrV film is partly activated at 160 degrees C, and its pressure performance is similar with one at higher temperature. The coating reduces the ultimate pressure and prominently shortens the pressure-down time in a sputter ion pump system, thus creating evenly distributed pressure profile in a coating pipe. The adsorption rate is steady, and adsorption amount increases linearly. Such TiZrV-coated pipe behaves like pump other than gas source in vacuum system.
收录类别	SCI
语种	英语
WOS记录号	WOS:000302332500002
公开日期	2012-07-04
内容类型	期刊论文
源URL	[http://ir.sinap.ac.cn/handle/331007/9531]
专题	上海应用物理研究所_中科院上海应用物理研究所2011-2017年
推荐引用方式 GB/T 7714	Zhang Haiou,Dai Dongdong,Tang Ziyi,et al. Investigation of vacuum performances of TiZrV coated pipe[J]. NUCLEAR SCIENCE AND TECHNIQUES,2011,22(6):326.
APA	Zhang Haiou,Dai Dongdong,Tang Ziyi,Zhang Jidong,Shao Bin,&He Suixia.(2011).Investigation of vacuum performances of TiZrV coated pipe.NUCLEAR SCIENCE AND TECHNIQUES,22(6),326.
MLA	Zhang Haiou,et al."Investigation of vacuum performances of TiZrV coated pipe".NUCLEAR SCIENCE AND TECHNIQUES 22.6(2011):326.