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Scaling behaviour of state-to-state coupling during hole trapping at Si/SiO2
Ma, Xiaolei; Jiang, Xiangwei; Chen, Jiezhi; Wang, Liwei; En, Yunfei
刊名2019 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM (IRPS)
2019
卷号2019-March
关键词Charge trapping Vacancy defect level Coupling constant Scaling behavior
DOI10.1109/IRPS.2019.8720537
会议名称IEEE International Reliability Physics Symposium (IRPS)
URL标识查看原文
会议日期MAR 31-APR 04, 2019
公开日期[db:dc_date_available]
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/4545395
专题山东大学
作者单位1.Chinese Acad Sci, Inst Semicond, State Key Lab Superlattices & Microstruct, Beijing 100083, Peoples R China.
2.[Chen,
推荐引用方式
GB/T 7714
Ma, Xiaolei,Jiang, Xiangwei,Chen, Jiezhi,et al. Scaling behaviour of state-to-state coupling during hole trapping at Si/SiO2[J]. 2019 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM (IRPS),2019,2019-March.
APA Ma, Xiaolei,Jiang, Xiangwei,Chen, Jiezhi,Wang, Liwei,&En, Yunfei.(2019).Scaling behaviour of state-to-state coupling during hole trapping at Si/SiO2.2019 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM (IRPS),2019-March.
MLA Ma, Xiaolei,et al."Scaling behaviour of state-to-state coupling during hole trapping at Si/SiO2".2019 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM (IRPS) 2019-March(2019).
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