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	Synthesis of Rutile TiO2 Thin Films at Low Temperature by DC Magnetron Sputtering
	Wang Ming'e; Ma Guojia; Sun Gang; Liu Xing; Zhang Lin; Gong Shuili; Dong Chuang
刊名	RARE METAL MATERIALS AND ENGINEERING
	2013
卷号	42页码:143-147
关键词	low temperature TiO2 film dc magnetron sputtering crystalline
ISSN号	1002-185X
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/4541874
专题	大连理工大学
作者单位	1.Dalian Univ Technol, Dalian 116024, Peoples R China. 2.Beijing Aeronaut Mfg Technol Res Inst, Sci & Technol Power Beam Proc Lab, Beijing 100024, Peoples R China. 3.Beijing Aeronaut Mfg Technol Res Inst, Sci & Technol Power Beam Proc Lab, Beijing 100024, Peoples R China. 4.Dalian Univ Technol, Dalian 116024, Peoples R China.
推荐引用方式 GB/T 7714	Wang Ming'e,Ma Guojia,Sun Gang,et al. Synthesis of Rutile TiO2 Thin Films at Low Temperature by DC Magnetron Sputtering[J]. RARE METAL MATERIALS AND ENGINEERING,2013,42:143-147.
APA	Wang Ming'e.,Ma Guojia.,Sun Gang.,Liu Xing.,Zhang Lin.,...&Dong Chuang.(2013).Synthesis of Rutile TiO2 Thin Films at Low Temperature by DC Magnetron Sputtering.RARE METAL MATERIALS AND ENGINEERING,42,143-147.
MLA	Wang Ming'e,et al."Synthesis of Rutile TiO2 Thin Films at Low Temperature by DC Magnetron Sputtering".RARE METAL MATERIALS AND ENGINEERING 42(2013):143-147.

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