Synthesis of Rutile TiO2 Thin Films at Low Temperature by DC Magnetron Sputtering | |
Wang Ming'e; Ma Guojia; Sun Gang; Liu Xing; Zhang Lin; Gong Shuili; Dong Chuang | |
刊名 | RARE METAL MATERIALS AND ENGINEERING
![]() |
2013 | |
卷号 | 42页码:143-147 |
关键词 | low temperature TiO2 film dc magnetron sputtering crystalline |
ISSN号 | 1002-185X |
URL标识 | 查看原文 |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/4541874 |
专题 | 大连理工大学 |
作者单位 | 1.Dalian Univ Technol, Dalian 116024, Peoples R China. 2.Beijing Aeronaut Mfg Technol Res Inst, Sci & Technol Power Beam Proc Lab, Beijing 100024, Peoples R China. 3.Beijing Aeronaut Mfg Technol Res Inst, Sci & Technol Power Beam Proc Lab, Beijing 100024, Peoples R China. 4.Dalian Univ Technol, Dalian 116024, Peoples R China. |
推荐引用方式 GB/T 7714 | Wang Ming'e,Ma Guojia,Sun Gang,et al. Synthesis of Rutile TiO2 Thin Films at Low Temperature by DC Magnetron Sputtering[J]. RARE METAL MATERIALS AND ENGINEERING,2013,42:143-147. |
APA | Wang Ming'e.,Ma Guojia.,Sun Gang.,Liu Xing.,Zhang Lin.,...&Dong Chuang.(2013).Synthesis of Rutile TiO2 Thin Films at Low Temperature by DC Magnetron Sputtering.RARE METAL MATERIALS AND ENGINEERING,42,143-147. |
MLA | Wang Ming'e,et al."Synthesis of Rutile TiO2 Thin Films at Low Temperature by DC Magnetron Sputtering".RARE METAL MATERIALS AND ENGINEERING 42(2013):143-147. |
个性服务 |
查看访问统计 |
相关权益政策 |
暂无数据 |
收藏/分享 |
除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。
修改评论