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	Improved Double-Probe Technique for Spatially Resolved Diagnosis of Dual-Frequency Capacitive Plasmas
	Wenqi, Lu; Xiangzhan, Jiang; Yongxin, Liu; Shuo, Yang; Quanzhi, Zhang; Xiaosong, Li; Yong, Xu; Aimin, Zhu; Younian, Wang; Lu, Wenqi
刊名	PLASMA SCIENCE & TECHNOLOGY
	2013
卷号	15页码:511-515
关键词	dual-frequency capacitive plasma double probe plasma diagnosis
ISSN号	1009-0630
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/4540010
专题	大连理工大学
作者单位	School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China
推荐引用方式 GB/T 7714	Wenqi, Lu,Xiangzhan, Jiang,Yongxin, Liu,et al. Improved Double-Probe Technique for Spatially Resolved Diagnosis of Dual-Frequency Capacitive Plasmas[J]. PLASMA SCIENCE & TECHNOLOGY,2013,15:511-515.
APA	Wenqi, Lu.,Xiangzhan, Jiang.,Yongxin, Liu.,Shuo, Yang.,Quanzhi, Zhang.,...&Wang, Younian.(2013).Improved Double-Probe Technique for Spatially Resolved Diagnosis of Dual-Frequency Capacitive Plasmas.PLASMA SCIENCE & TECHNOLOGY,15,511-515.
MLA	Wenqi, Lu,et al."Improved Double-Probe Technique for Spatially Resolved Diagnosis of Dual-Frequency Capacitive Plasmas".PLASMA SCIENCE & TECHNOLOGY 15(2013):511-515.

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