Using silicon molds for ultrasonic embossing on Polymethyl Methacrylate (PMMA) substrates | |
Qi, Na; Luo, Yi; Yan, Xu; Wang, Xiaodong; Wang, Liding | |
刊名 | MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
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2013 | |
卷号 | 19页码:609-616 |
ISSN号 | 0946-7076 |
URL标识 | 查看原文 |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/4539135 |
专题 | 大连理工大学 |
作者单位 | Dalian Univ Technol, Key Lab Micro Nano Technol & Syst Liaoning Prov, Dalian 116023, Peoples R China. |
推荐引用方式 GB/T 7714 | Qi, Na,Luo, Yi,Yan, Xu,et al. Using silicon molds for ultrasonic embossing on Polymethyl Methacrylate (PMMA) substrates[J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,2013,19:609-616. |
APA | Qi, Na,Luo, Yi,Yan, Xu,Wang, Xiaodong,&Wang, Liding.(2013).Using silicon molds for ultrasonic embossing on Polymethyl Methacrylate (PMMA) substrates.MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,19,609-616. |
MLA | Qi, Na,et al."Using silicon molds for ultrasonic embossing on Polymethyl Methacrylate (PMMA) substrates".MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 19(2013):609-616. |
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