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Using silicon molds for ultrasonic embossing on Polymethyl Methacrylate (PMMA) substrates
Qi, Na; Luo, Yi; Yan, Xu; Wang, Xiaodong; Wang, Liding
刊名MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
2013
卷号19页码:609-616
ISSN号0946-7076
URL标识查看原文
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/4539135
专题大连理工大学
作者单位Dalian Univ Technol, Key Lab Micro Nano Technol & Syst Liaoning Prov, Dalian 116023, Peoples R China.
推荐引用方式
GB/T 7714
Qi, Na,Luo, Yi,Yan, Xu,et al. Using silicon molds for ultrasonic embossing on Polymethyl Methacrylate (PMMA) substrates[J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,2013,19:609-616.
APA Qi, Na,Luo, Yi,Yan, Xu,Wang, Xiaodong,&Wang, Liding.(2013).Using silicon molds for ultrasonic embossing on Polymethyl Methacrylate (PMMA) substrates.MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,19,609-616.
MLA Qi, Na,et al."Using silicon molds for ultrasonic embossing on Polymethyl Methacrylate (PMMA) substrates".MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 19(2013):609-616.
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