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	The adhesion strength and mechanical properties of SiC films deposited on SiAlON buffer layer by magnetron sputtering
	Song, Shumei; Sun, Hui; Chen, Sheng-Chi; Dai, Mingjiang; Wang, Kunlun; Zheng, Xiaoyan; Lu, Yingbo; Yang, Tianlin; Yue, Zhen-Ming
刊名	SURFACE & COATINGS TECHNOLOGY
	2019
卷号	360页码:116-120
关键词	SiC SiAlON Buffer layer Adhesion strength Hardness
DOI	10.1016/j.surfcoat.2018.12.115
URL标识	查看原文
公开日期	[db:dc_date_available]
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/4533008
专题	山东大学
作者单位	Shandong Univ Weihai, Sch Space Sci & Phys, 180 Wenhuaxi Rd, Weihai
推荐引用方式 GB/T 7714	Song, Shumei,Sun, Hui,Chen, Sheng-Chi,et al. The adhesion strength and mechanical properties of SiC films deposited on SiAlON buffer layer by magnetron sputtering[J]. SURFACE & COATINGS TECHNOLOGY,2019,360:116-120.
APA	Song, Shumei.,Sun, Hui.,Chen, Sheng-Chi.,Dai, Mingjiang.,Wang, Kunlun.,...&Yue, Zhen-Ming.(2019).The adhesion strength and mechanical properties of SiC films deposited on SiAlON buffer layer by magnetron sputtering.SURFACE & COATINGS TECHNOLOGY,360,116-120.
MLA	Song, Shumei,et al."The adhesion strength and mechanical properties of SiC films deposited on SiAlON buffer layer by magnetron sputtering".SURFACE & COATINGS TECHNOLOGY 360(2019):116-120.

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