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	On dynamic behavior of triangular shaped cantilevers in MEMS sensors: Effect of curvature
	Zhang, Gui-Ming; Zhao, Li-Bo; Huang, En-Ze; Yuan, Guo-Ying; Li, Yong; Liu, Zhi-Gang; Jiang, Zhuang-De
	2010
关键词	ANSYS software Change of temperatures Dynamic behaviors Effect of curvature Harmonic response analysis Micro processing Radius of curvature Solidworks software
期号	[db:dc_citation_issue]
DOI	[db:dc_identifier_doi]
页码	1937-1939
会议录	ICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings
URL标识	查看原文
ISSN号	9781424457984
WOS记录号	[DB:DC_IDENTIFIER_WOSID]
内容类型	会议论文
URI标识	http://www.corc.org.cn/handle/1471x/4503076
专题	西安交通大学
推荐引用方式 GB/T 7714	Zhang, Gui-Ming,Zhao, Li-Bo,Huang, En-Ze,et al. On dynamic behavior of triangular shaped cantilevers in MEMS sensors: Effect of curvature[C]. 见:.

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