| Investigation based on MEMS double Si3N4 resonant beams pressure sensor | |
| Chuan, Yang; Can, Guo | |
| 2010 | |
| 关键词 | Finite element analysis software Key dimensions Pressure sensitive Resonant beams Si3N4 Vibration differential equations |
| 期号 | [db:dc_citation_issue] |
| DOI | [db:dc_identifier_doi] |
| 页码 | 5-8 |
| 会议录 | 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
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| URL标识 | 查看原文 |
| ISSN号 | 9781424465439 |
| WOS记录号 | [DB:DC_IDENTIFIER_WOSID] |
| 内容类型 | 会议论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/4502635 |
| 专题 | 西安交通大学 |
| 推荐引用方式 GB/T 7714 | Chuan, Yang,Can, Guo. Investigation based on MEMS double Si3N4 resonant beams pressure sensor[C]. 见:. |
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