Characterization of sidewall roughness for silicon microstructures in micro actuator | |
Han, Guoqiang; Jiang, Zhuangde; Jing, Weixuan; Gao, Jianzhong; Prewett, Philip D.; Jiang, Kyle | |
刊名 | INTERNATIONAL JOURNAL OF APPLIED ELECTROMAGNETICS AND MECHANICS
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2010 | |
卷号 | 33期号:[db:dc_citation_issue]页码:985-990 |
关键词 | line edge roughness (LER) Micro actuator deep reactive ion etching (DRIE) scanning electron microscope (SEM) |
ISSN号 | 1383-5416 |
DOI | [db:dc_identifier_doi] |
URL标识 | 查看原文 |
WOS记录号 | [DB:DC_IDENTIFIER_WOSID] |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/4500668 |
专题 | 西安交通大学 |
推荐引用方式 GB/T 7714 | Han, Guoqiang,Jiang, Zhuangde,Jing, Weixuan,et al. Characterization of sidewall roughness for silicon microstructures in micro actuator[J]. INTERNATIONAL JOURNAL OF APPLIED ELECTROMAGNETICS AND MECHANICS,2010,33([db:dc_citation_issue]):985-990. |
APA | Han, Guoqiang,Jiang, Zhuangde,Jing, Weixuan,Gao, Jianzhong,Prewett, Philip D.,&Jiang, Kyle.(2010).Characterization of sidewall roughness for silicon microstructures in micro actuator.INTERNATIONAL JOURNAL OF APPLIED ELECTROMAGNETICS AND MECHANICS,33([db:dc_citation_issue]),985-990. |
MLA | Han, Guoqiang,et al."Characterization of sidewall roughness for silicon microstructures in micro actuator".INTERNATIONAL JOURNAL OF APPLIED ELECTROMAGNETICS AND MECHANICS 33.[db:dc_citation_issue](2010):985-990. |
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