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	Preparation and Properties Characterization of Gradient alpha-Ta(N)/TaN Bi-layer Diffusion Barrier
	Liu Chunhai; Luo Hong; Jin Yongzhong; Song Zhongxiao; Chen Shunli; Wang Yuan; An Zhu; Liu Ming
刊名	RARE METAL MATERIALS AND ENGINEERING
	2012
卷号	41期号:[db:dc_citation_issue]页码:1855-1858
关键词	thermal stability resistivity diffusion barrier microstructure
ISSN号	1002-185X
DOI	[db:dc_identifier_doi]
URL标识	查看原文
WOS记录号	[DB:DC_IDENTIFIER_WOSID]
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/4452860
专题	西安交通大学
推荐引用方式 GB/T 7714	Liu Chunhai,Luo Hong,Jin Yongzhong,et al. Preparation and Properties Characterization of Gradient alpha-Ta(N)/TaN Bi-layer Diffusion Barrier[J]. RARE METAL MATERIALS AND ENGINEERING,2012,41([db:dc_citation_issue]):1855-1858.
APA	Liu Chunhai.,Luo Hong.,Jin Yongzhong.,Song Zhongxiao.,Chen Shunli.,...&Liu Ming.(2012).Preparation and Properties Characterization of Gradient alpha-Ta(N)/TaN Bi-layer Diffusion Barrier.RARE METAL MATERIALS AND ENGINEERING,41([db:dc_citation_issue]),1855-1858.
MLA	Liu Chunhai,et al."Preparation and Properties Characterization of Gradient alpha-Ta(N)/TaN Bi-layer Diffusion Barrier".RARE METAL MATERIALS AND ENGINEERING 41.[db:dc_citation_issue](2012):1855-1858.

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