Preparation and Properties Characterization of Gradient alpha-Ta(N)/TaN Bi-layer Diffusion Barrier | |
Liu Chunhai; Luo Hong; Jin Yongzhong; Song Zhongxiao; Chen Shunli; Wang Yuan; An Zhu; Liu Ming | |
刊名 | RARE METAL MATERIALS AND ENGINEERING
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2012 | |
卷号 | 41期号:[db:dc_citation_issue]页码:1855-1858 |
关键词 | thermal stability resistivity diffusion barrier microstructure |
ISSN号 | 1002-185X |
DOI | [db:dc_identifier_doi] |
URL标识 | 查看原文 |
WOS记录号 | [DB:DC_IDENTIFIER_WOSID] |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/4452860 |
专题 | 西安交通大学 |
推荐引用方式 GB/T 7714 | Liu Chunhai,Luo Hong,Jin Yongzhong,et al. Preparation and Properties Characterization of Gradient alpha-Ta(N)/TaN Bi-layer Diffusion Barrier[J]. RARE METAL MATERIALS AND ENGINEERING,2012,41([db:dc_citation_issue]):1855-1858. |
APA | Liu Chunhai.,Luo Hong.,Jin Yongzhong.,Song Zhongxiao.,Chen Shunli.,...&Liu Ming.(2012).Preparation and Properties Characterization of Gradient alpha-Ta(N)/TaN Bi-layer Diffusion Barrier.RARE METAL MATERIALS AND ENGINEERING,41([db:dc_citation_issue]),1855-1858. |
MLA | Liu Chunhai,et al."Preparation and Properties Characterization of Gradient alpha-Ta(N)/TaN Bi-layer Diffusion Barrier".RARE METAL MATERIALS AND ENGINEERING 41.[db:dc_citation_issue](2012):1855-1858. |
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