Research on the effect of nitrogen implantation doses with the structure of separated by implanted oxygen and nitrogen
Enxia zhang, Wanbing Yi ; Jing Chen, Zhengxuan Zhang ; Xi Wang
刊名Smart Materials and Structures, 14, (2005) P42-45
2005
卷号14页码:42-45
收录类别SCI
语种英语
公开日期2012-06-13
内容类型期刊论文
源URL[http://ir.sim.ac.cn/handle/331004/109079]  
专题上海微系统与信息技术研究所_功能材料与器件_期刊论文
推荐引用方式
GB/T 7714
Enxia zhang, Wanbing Yi,Jing Chen, Zhengxuan Zhang,Xi Wang. Research on the effect of nitrogen implantation doses with the structure of separated by implanted oxygen and nitrogen[J]. Smart Materials and Structures, 14, (2005) P42-45,2005,14:42-45.
APA Enxia zhang, Wanbing Yi,Jing Chen, Zhengxuan Zhang,&Xi Wang.(2005).Research on the effect of nitrogen implantation doses with the structure of separated by implanted oxygen and nitrogen.Smart Materials and Structures, 14, (2005) P42-45,14,42-45.
MLA Enxia zhang, Wanbing Yi,et al."Research on the effect of nitrogen implantation doses with the structure of separated by implanted oxygen and nitrogen".Smart Materials and Structures, 14, (2005) P42-45 14(2005):42-45.
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