Effects of nitrogen element on total-dose irradiation response of high-k Hf-based dielectric films

	Effects of nitrogen element on total-dose irradiation response of high-k Hf-based dielectric films
	Song, Zhaorui (Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences) ; Cheng, Xinhong ; Zhang, Enxia ; Xing, Yumei ; Yu, Yuehui ; Zheng, Zhihong ; Shen, Qinwo ; Zhang, Zhengxuan ; Wang, Xi
刊名	He Jishu/Nuclear Techniques, v 30, n 8, August, 2007
	2007
卷号	30 期号:8
收录类别	SCI
公开日期	2012-06-13
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/109072]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文
推荐引用方式 GB/T 7714	Song, Zhaorui ,Cheng, Xinhong,Zhang, Enxia,et al. Effects of nitrogen element on total-dose irradiation response of high-k Hf-based dielectric films[J]. He Jishu/Nuclear Techniques, v 30, n 8, August, 2007,2007,30(8).
APA	Song, Zhaorui .,Cheng, Xinhong.,Zhang, Enxia.,Xing, Yumei.,Yu, Yuehui.,...&Wang, Xi.(2007).Effects of nitrogen element on total-dose irradiation response of high-k Hf-based dielectric films.He Jishu/Nuclear Techniques, v 30, n 8, August, 2007,30(8).
MLA	Song, Zhaorui ,et al."Effects of nitrogen element on total-dose irradiation response of high-k Hf-based dielectric films".He Jishu/Nuclear Techniques, v 30, n 8, August, 2007 30.8(2007).