Precise assembly and electrical contact of MWCNT based on AC dielectrophoresis and robotic nanomanipulation technology

CORC > 沈阳自动化研究所 > 中国科学院沈阳自动化研究所 > 机器人学研究室

	Precise assembly and electrical contact of MWCNT based on AC dielectrophoresis and robotic nanomanipulation technology
	Tian XJ(田孝军); Wang YC(王越超); Xi N(席宁); Dong ZL(董再励); Yu P(于鹏); Liu LQ(刘连庆); Li WJ(李文荣)
	2006
会议名称	IEEE International Conference of Nano/Micro Engineered and Molecular Systems
会议日期	January 18-21, 2006
会议地点	Zhuhai, China
关键词	precise assembly electrical contact MWCNT a c DEP robotic nanomanipulation
页码	928-931
通讯作者	王越超
中文摘要	Nowadays research on single CNT based nanoeletronic device arises much interest among researchers, but in the fabrication of CNT based nanoeletronic device, one of the key technical problems is to realize precise assembly and electrical contact between CNT and microelectrode. For solving the problem, first AC dieletrophoresis (DEP) method is used to coarsely position batch of CNTs near the microelectrode, then AFM based robotic nanomanipulation method is used to precisely position, assembly and make electric contact of the selected CNT. MWCNT assembly and electric contact experiments verify the effectiveness of these two methods' integration.
收录类别	EI ; CPCI（ISTP）
产权排序	1
会议主办者	IEEE
会议录	2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Vols 1-3
会议录出版者	IEEE
会议录出版地	NEW YORK
语种	英语
ISBN号	978-1-4244-0139-0
WOS记录号	WOS:000248485801093
内容类型	会议论文
源URL	[http://ir.sia.cn/handle/173321/8830]
专题	沈阳自动化研究所_机器人学研究室
推荐引用方式 GB/T 7714	Tian XJ,Wang YC,Xi N,et al. Precise assembly and electrical contact of MWCNT based on AC dielectrophoresis and robotic nanomanipulation technology[C]. 见:IEEE International Conference of Nano/Micro Engineered and Molecular Systems. Zhuhai, China. January 18-21, 2006.