Feedback control implementation for AFM contact-mode scanner | |
Zhang WL(张纹霖); Miao L(缪磊); Zheng YH(郑云辉); Dong ZL(董再励); Xi N(席宁) | |
2008 | |
会议名称 | 3rd IEEE International Conference of Nano/Micro Engineered and Molecular Systems |
会议日期 | January 6-9, 2008 |
会议地点 | Sanya, China |
关键词 | Nano manipulation AFM hysteresis Preisach model |
页码 | 590-594 |
中文摘要 | The atomic force microscope (AFM) has become a standard technique to measure the topography properties of sample surfaces with nanometer resolution. And the AFM tip based Nano manipulation system plays an important role in the field of Nano research. However, nearly all the systems are designed in the commercial AFM machine, in which the software and hardware is not open to perform the Nano manipulation related research. This paper describes a feedback control system implementation for AFM contact-mode scanner, as part of work in building a Nano manipulation system. With PSD sensor and piezoceramic driver, we designed an embedded control system to fulfill the scanning experiments. The imaging results of silicon steps using regular PID feedback control scheme show that the scanning performance is limited by the inherent piezoelectric actuator nonlinear characteristics. In order to achieve better scanning image, we add a Preisach model based feedforward loop into the PID feedback controller to compensate for the hysteresis effect of the piezoceramic actuator, and the performance has been improved moderately. This AFM platform will be used as a testbed for future research work and experiments on AFM scan and manipulation. |
收录类别 | EI ; CPCI(ISTP) |
产权排序 | 1 |
会议主办者 | IEEE, State Key Lab Multi Spectral Informat Proc Technol, Chinese Soc Micro Nano Technol, Ctr Micro & Nano Syst, IEEE Nanotechnol Council, Shenyang Inst Automat, Univ California, UCLA, Ctr Cell Control, Global Engn Technol Inst, Nanosurf AG, Smart Instruments Nanosci & Nanotechnol, US Army Int Technol Ctr, Pacific |
会议录 | 2008 3RD IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3 |
会议录出版者 | IEEE |
会议录出版地 | NEW YORK |
语种 | 英语 |
ISBN号 | 978-1-4244-1907-4 |
WOS记录号 | WOS:000257066200135 |
内容类型 | 会议论文 |
源URL | [http://ir.sia.cn/handle/173321/8713] |
专题 | 沈阳自动化研究所_机器人学研究室 |
推荐引用方式 GB/T 7714 | Zhang WL,Miao L,Zheng YH,et al. Feedback control implementation for AFM contact-mode scanner[C]. 见:3rd IEEE International Conference of Nano/Micro Engineered and Molecular Systems. Sanya, China. January 6-9, 2008. |
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