A probability approach for on-line tip localization with local scan based landmark sensing in nanomanipulations

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	A probability approach for on-line tip localization with local scan based landmark sensing in nanomanipulations
	Yuan S(袁帅); Liu LQ(刘连庆); Wang ZD(王志东); Xi N(席宁); Wang YC(王越超); Dong ZL(董再励); Wang ZY(王智宇)
	2011
会议名称	The First International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale
会议日期	August 29 - September 2, 2011
会议地点	Changchun, China
关键词	AFM based Nanomanipulation On-line tip localization Probability
页码	6 pp.
中文摘要	AFM based nanomanipulation has becoming a promising approach in developing devices and structures at nanoscale. One of the prerequisites for the effective and successful nanomanipulation is that the relative position between the AFM tip and the manipulated object can be controlled accurately. However this prerequisite is still hindered by the spatial uncertainties aroused from the PZT nonlinearity and thermal drift. This paper proposes a probability referenced tip localization method to solve these problems. The key idea is that the tip position is not only calculated from the applied PZT voltages, but also combined with the sensing information about the landmarks set in the sample surface. Furthermore, the uncertainties in the process of both tip motion and landmark sensing are described and considered in tip localization, which results in a higher positioning accuracy. In addition, the landmarks are selected from the features of sample surface, positioning error due to the thermal drift can be compensated automatically. Both the simulation and experimental results are presented to demonstrate the effectiveness and efficiency of the proposed method.
产权排序	1
会议主办者	National Natural Science Foundation of China
会议录	The First International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale
语种	英语
内容类型	会议论文
源URL	[http://ir.sia.cn/handle/173321/8513]
专题	沈阳自动化研究所_机器人学研究室
推荐引用方式 GB/T 7714	Yuan S,Liu LQ,Wang ZD,et al. A probability approach for on-line tip localization with local scan based landmark sensing in nanomanipulations[C]. 见:The First International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale. Changchun, China. August 29 - September 2, 2011.