Micro ICPF actuators for aqueous sensing and manipulation

CORC > 沈阳自动化研究所 > 中国科学院沈阳自动化研究所 > 机器人学研究室

	Micro ICPF actuators for aqueous sensing and manipulation
	Zhou, Wenli; Li WJ(李文荣)
刊名	Sensors and Actuators A: Physical
	2004
卷号	114 期号:2-3 页码:406-412
关键词	Polymer actuator Micro ICPF Underwater actuator
ISSN号	0924-4247
通讯作者	李文荣
产权排序	1
中文摘要	This paper presents the results of our ongoing investigation of using Nafion solution to construct micron scale actuators as grippers to operate under aqueous environment. Thus far, we have demonstrated that MEMS-based fabrication of cantilever structures composed of Au/Nafion/Au tri-layers on silicon substrates is possible using Nafion solution. The smallest actuators fabricated were 30 [mu]m wide, 300 [mu]m long and 0.4 [mu]m thick. We have shown that two-finger actuators (each 100 [mu]m wide, 1200 [mu]m long and 0.4 [mu]m thick) can be fully actuated in water at ~7 V DC. In addition, with a special sacrificial release process, micro ICPF structures can be made to curl whenever they come in contact with water, and can be de-curled instantaneously when they are immersed in acid, suggesting that they can be used in sensing pH level changes.
WOS标题词	Science & Technology ; Technology
类目[WOS]	Engineering, Electrical & Electronic ; Instruments & Instrumentation
研究领域[WOS]	Engineering ; Instruments & Instrumentation
收录类别	SCI ; EI ; CPCI（ISTP）
语种	英语
WOS记录号	WOS:000223704800039
公开日期	2012-05-29
内容类型	期刊论文
源URL	[http://ir.sia.cn/handle/173321/7375]
专题	沈阳自动化研究所_机器人学研究室
推荐引用方式 GB/T 7714	Zhou, Wenli,Li WJ. Micro ICPF actuators for aqueous sensing and manipulation[J]. Sensors and Actuators A: Physical,2004,114(2-3):406-412.
APA	Zhou, Wenli,&Li WJ.(2004).Micro ICPF actuators for aqueous sensing and manipulation.Sensors and Actuators A: Physical,114(2-3),406-412.
MLA	Zhou, Wenli,et al."Micro ICPF actuators for aqueous sensing and manipulation".Sensors and Actuators A: Physical 114.2-3(2004):406-412.