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	Infinite Dimension Modeling of a Novel Micro Force Sensor and the Application in Micromanipulation
	Liu YY(刘意杨); Wang YC(王越超); Yu P(于鹏); Dong ZL(董再励)
刊名	International Journal of Information Acquisition
	2010
卷号	7期号:4页码:323-329
关键词	Micromanipulation Micro force Sensor Infinite dimension
ISSN号	0219-8789
产权排序	1
中文摘要	To accurately measure the micro interactive force (For example, adhesion, surface tension, friction, and assembly force) acting on micro devices during micro/nano manipulation, a novel micro force sensor that can reliably measure force in the range of sub-micro-Newton (μN) is designed and developed in this paper. During the application of this micro force sensor in micro/nano manipulation, the accuracy of this sensor’s model is quite important to the force control of the system. Therefore, the accurate infinite dimension model of the micro force sensor and micro manipulator is built up. Based on the infinite dimension model, the impedance control system is designed. To verify the infinite dimension model and the control system, micromanipulation experiments are designed and realized. Experiment results verify the accuracy of the infinite dimension model of the sensor, and show the efficiency of the impedance control system. The developed micro force sensor and the infinite dimension modeling provide a feasible and versatile solution in micro force sensing and feedback force control for micro/nano manipulation, and will promote the technology of automating the micro/nano manipulation.
语种	英语
公开日期	2012-05-29
内容类型	期刊论文
源URL	[http://ir.sia.cn/handle/173321/7365]
专题	沈阳自动化研究所_机器人学研究室
推荐引用方式 GB/T 7714	Liu YY,Wang YC,Yu P,et al. Infinite Dimension Modeling of a Novel Micro Force Sensor and the Application in Micromanipulation[J]. International Journal of Information Acquisition,2010,7(4):323-329.
APA	Liu YY,Wang YC,Yu P,&Dong ZL.(2010).Infinite Dimension Modeling of a Novel Micro Force Sensor and the Application in Micromanipulation.International Journal of Information Acquisition,7(4),323-329.
MLA	Liu YY,et al."Infinite Dimension Modeling of a Novel Micro Force Sensor and the Application in Micromanipulation".International Journal of Information Acquisition 7.4(2010):323-329.

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