Assembly and Fabrication of Single-wall Carbon Nanotube Field Effect Transistor Using Dielectrophoresis Method

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	Assembly and Fabrication of Single-wall Carbon Nanotube Field Effect Transistor Using Dielectrophoresis Method
	Xu K(许可); Dong ZL(董再励); Tian XJ(田孝军); Liu J(刘剑); Wu CD(吴成东)
刊名	Integrated Ferroelectrics
	2011
卷号	127 期号:1 页码:21-27
关键词	Single-wall carbon nanotube dielectrophoresis field effect transistor atom force microscopy
ISSN号	1058-4587
产权排序	1
中文摘要	On account of their sizes and unique properties,single-wall carbon nanotubes are candidates for a number of building blocks in nanoscale electronics. With respect to the assembly of carbon nanotube field effect transistor, the dielectrophoresis technology is adopted, which assembles SWCNTs between the microelectrodes, SWCNTs are affected by the electrophoretic force which is carried out by the related theoretical analysis in a nonuniform electric field. The driving electric field of dielectrophoresis is simulated by the comsol software. According to the simulation results, a number of the experiments are done. The applied alternating current voltage has a frequency of 2 MHz and an amplitude of 10 V. It turns out that the required experimental parameters of the efficient assembly of SWCNT are obtained. AFM scanning and electrical properties of SWCNTs show that the method can achieve the effective assembly of carbon nanotube field effect transistor. SWCNTs are driven in the microelectrode gap, having a good arrangement of uniform orientation and assembly results, and proportional to the arrangement density along the electrode width direction and the duration of DEP. As a result, it also provides an effective method of assembly and fabrication for other one-dimensional nanomaterials assembly of nanoelectronic devices.
WOS标题词	Science & Technology ; Technology ; Physical Sciences
类目[WOS]	Engineering, Electrical & Electronic ; Physics, Applied ; Physics, Condensed Matter
研究领域[WOS]	Engineering ; Physics
收录类别	SCI ; EI
语种	英语
WOS记录号	WOS:000297010500032
公开日期	2012-05-29
内容类型	期刊论文
源URL	[http://ir.sia.cn/handle/173321/7316]
专题	沈阳自动化研究所_机器人学研究室
推荐引用方式 GB/T 7714	Xu K,Dong ZL,Tian XJ,et al. Assembly and Fabrication of Single-wall Carbon Nanotube Field Effect Transistor Using Dielectrophoresis Method[J]. Integrated Ferroelectrics,2011,127(1):21-27.
APA	Xu K,Dong ZL,Tian XJ,Liu J,&Wu CD.(2011).Assembly and Fabrication of Single-wall Carbon Nanotube Field Effect Transistor Using Dielectrophoresis Method.Integrated Ferroelectrics,127(1),21-27.
MLA	Xu K,et al."Assembly and Fabrication of Single-wall Carbon Nanotube Field Effect Transistor Using Dielectrophoresis Method".Integrated Ferroelectrics 127.1(2011):21-27.