Film forming apparatus for measuring thickness of liquid, has displacement control device which is provided to control film-forming plate in group into template module moved in direction vertical to direction of gravity distance. | |
LI L LIU R WANG T WANG C YOU H | |
2015 | |
公开日期 | 2015-02-18 |
URL标识 | 查看原文 |
申请日期 | 2014-09-28 |
内容类型 | 专利 |
URI标识 | http://www.corc.org.cn/handle/1471x/4412863 |
专题 | 大连理工大学 |
作者单位 | UNIV DALIAN TECHNOLOGY (UYDA-C |
推荐引用方式 GB/T 7714 | LI L LIU R WANG T WANG C YOU H. Film forming apparatus for measuring thickness of liquid, has displacement control device which is provided to control film-forming plate in group into template module moved in direction vertical to direction of gravity distance.. 2015-01-01. |
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