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	Fabrication of nanochannels using underexposed nanoimprint method
	Wang, Zhiwen; Chu, Jinkui; Wang, Qianyi; Zhang, Ran; Cui, Yan
刊名	MICRO & NANO LETTERS
	2015
卷号	10页码:34-36
关键词	nanolithography nanostructured materials nanofabrication microanalysis systems nanoanalysis systems sealing material exposure time nanotrenches uniform nanochannel arrays under-exposed nanoimprint nanochannel fabrication
ISSN号	1750-0443
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/4405256
专题	大连理工大学
作者单位	Dalian Univ Technol, Key Lab Micro Nano Technol & Syst Liaoning Prov, Dalian 116024, Peoples R China.
推荐引用方式 GB/T 7714	Wang, Zhiwen,Chu, Jinkui,Wang, Qianyi,et al. Fabrication of nanochannels using underexposed nanoimprint method[J]. MICRO & NANO LETTERS,2015,10:34-36.
APA	Wang, Zhiwen,Chu, Jinkui,Wang, Qianyi,Zhang, Ran,&Cui, Yan.(2015).Fabrication of nanochannels using underexposed nanoimprint method.MICRO & NANO LETTERS,10,34-36.
MLA	Wang, Zhiwen,et al."Fabrication of nanochannels using underexposed nanoimprint method".MICRO & NANO LETTERS 10(2015):34-36.

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