Fabrication of nanochannels using underexposed nanoimprint method | |
Wang, Zhiwen; Chu, Jinkui; Wang, Qianyi; Zhang, Ran; Cui, Yan | |
刊名 | MICRO & NANO LETTERS
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2015 | |
卷号 | 10页码:34-36 |
关键词 | nanolithography nanostructured materials nanofabrication microanalysis systems nanoanalysis systems sealing material exposure time nanotrenches uniform nanochannel arrays under-exposed nanoimprint nanochannel fabrication |
ISSN号 | 1750-0443 |
URL标识 | 查看原文 |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/4405256 |
专题 | 大连理工大学 |
作者单位 | Dalian Univ Technol, Key Lab Micro Nano Technol & Syst Liaoning Prov, Dalian 116024, Peoples R China. |
推荐引用方式 GB/T 7714 | Wang, Zhiwen,Chu, Jinkui,Wang, Qianyi,et al. Fabrication of nanochannels using underexposed nanoimprint method[J]. MICRO & NANO LETTERS,2015,10:34-36. |
APA | Wang, Zhiwen,Chu, Jinkui,Wang, Qianyi,Zhang, Ran,&Cui, Yan.(2015).Fabrication of nanochannels using underexposed nanoimprint method.MICRO & NANO LETTERS,10,34-36. |
MLA | Wang, Zhiwen,et al."Fabrication of nanochannels using underexposed nanoimprint method".MICRO & NANO LETTERS 10(2015):34-36. |
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