Simulation of ion transport in an extended electron cyclotron resonance plasma

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	Simulation of ion transport in an extended electron cyclotron resonance plasma
	Liu MH; Hu XW; Wu HM(吴汉明); Wu QC; Yu GY; Ren ZX
刊名	Journal of Applied Physics
	2000
卷号	87 期号:3 页码:1070-1075
ISSN号	0021-8979
通讯作者	Liu, MH (reprint author), Chinese Acad Sci, Inst Plasma Phys, Hefei 230031, Anhui, Peoples R China.
中文摘要	A two-dimensional hybrid model for an electron cyclotron resonance (ECR) plasma reactor is improved by taking into account the microwave absorption. With this code, the velocity and angle distribution function of ions in the source and downstream areas, and the ion current density at the substrate surface in an extended ECR plasma reactor were investigated. The spatial profiles as well as the dependence of these distribution functions on pressure and microwave power were discussed. It is shown that the results are in good agreement with many experimental measurements.
学科主题	力学
类目[WOS]	Physics, Applied
研究领域[WOS]	Physics
关键词[WOS]	DISCHARGES ; ENERGY ; STREAM
收录类别	SCI
语种	英语
WOS记录号	WOS:000084822400011
公开日期	2007-06-15 ; 2007-12-05 ; 2009-06-23
内容类型	期刊论文
源URL	[http://dspace.imech.ac.cn/handle/311007/15343]
专题	力学研究所_力学所知识产出(1956-2008)
推荐引用方式 GB/T 7714	Liu MH,Hu XW,Wu HM,et al. Simulation of ion transport in an extended electron cyclotron resonance plasma[J]. Journal of Applied Physics,2000,87(3):1070-1075.
APA	Liu MH,Hu XW,吴汉明,Wu QC,Yu GY,&Ren ZX.(2000).Simulation of ion transport in an extended electron cyclotron resonance plasma.Journal of Applied Physics,87(3),1070-1075.
MLA	Liu MH,et al."Simulation of ion transport in an extended electron cyclotron resonance plasma".Journal of Applied Physics 87.3(2000):1070-1075.