| Hybrid Simulation of Duty Cycle Influences on Pulse Modulated RF SiH4/Ar Discharge | |
| Wang Xifeng; Song Yuanhong; Zhao Shuxia; Dai Zhongling; Wang Younian | |
| 刊名 | PLASMA SCIENCE & TECHNOLOGY
 |
| 2016 | |
| 卷号 | 18页码:394-399 |
| 关键词 | hybrid model EEDF pulse modulation SiH4/Ar mixture |
| ISSN号 | 1009-0630 |
| URL标识 | 查看原文 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/4367575 |
| 专题 | 大连理工大学 |
| 作者单位 | Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116024, Peoples R China. |
| 推荐引用方式 GB/T 7714 | Wang Xifeng,Song Yuanhong,Zhao Shuxia,et al. Hybrid Simulation of Duty Cycle Influences on Pulse Modulated RF SiH4/Ar Discharge[J]. PLASMA SCIENCE & TECHNOLOGY,2016,18:394-399. |
| APA | Wang Xifeng,Song Yuanhong,Zhao Shuxia,Dai Zhongling,&Wang Younian.(2016).Hybrid Simulation of Duty Cycle Influences on Pulse Modulated RF SiH4/Ar Discharge.PLASMA SCIENCE & TECHNOLOGY,18,394-399. |
| MLA | Wang Xifeng,et al."Hybrid Simulation of Duty Cycle Influences on Pulse Modulated RF SiH4/Ar Discharge".PLASMA SCIENCE & TECHNOLOGY 18(2016):394-399. |
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