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	Sensitivity analysis of pull-in voltage for RF MEMS switch based on modified couple stress theory
	Junhua ZHU[1,2] Renhuai LIU[1,2,3]
	2015
卷号	36期号:12页码:1555
关键词	电压灵敏度 微机电系统 灵敏度分析 偶应力理论 电开关 射频 欧拉-伯努利梁 非线性方程
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/4311697
专题	暨南大学
作者单位	1.[1]Science and Technology on Reliability Physics and Application Technology of Electronic Component Laboratory, Guangzhou 510610, China 2.[2]China Electronic Product Reliability and Environmental Testing Research Institute, Guangzhou 510610, China 3.[3]Institute of Applied Mechanics, Jinan University, Guangzhou 510632, China
推荐引用方式 GB/T 7714	Junhua ZHU[1,2] Renhuai LIU[1,2,3]. Sensitivity analysis of pull-in voltage for RF MEMS switch based on modified couple stress theory[J],2015,36(12):1555.
APA	Junhua ZHU[1,2] Renhuai LIU[1,2,3].(2015).Sensitivity analysis of pull-in voltage for RF MEMS switch based on modified couple stress theory.,36(12),1555.
MLA	Junhua ZHU[1,2] Renhuai LIU[1,2,3]."Sensitivity analysis of pull-in voltage for RF MEMS switch based on modified couple stress theory".36.12(2015):1555.

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