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	Multilayer CNx/TiN composite films prepared by multi-are assisted DC reactive magnetron sputtering
	Liu, CS; Wu, DW; Fu, DJ; Ye, MS; Gao, P; Peng, YG; Fan, XJ
刊名	SURFACE & COATINGS TECHNOLOGY
	2000
卷号	128
关键词	carbon nitride microstructure mechanical properties
ISSN号	0257-8972
DOI	10.1016/S0257-8972(00)00572-7
URL标识	查看原文
收录类别	SCIE ; CPCI-S ; EI
语种	英语
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/4195456
专题	武汉大学
推荐引用方式 GB/T 7714	Liu, CS,Wu, DW,Fu, DJ,et al. Multilayer CNx/TiN composite films prepared by multi-are assisted DC reactive magnetron sputtering[J]. SURFACE & COATINGS TECHNOLOGY,2000,128.
APA	Liu, CS.,Wu, DW.,Fu, DJ.,Ye, MS.,Gao, P.,...&Fan, XJ.(2000).Multilayer CNx/TiN composite films prepared by multi-are assisted DC reactive magnetron sputtering.SURFACE & COATINGS TECHNOLOGY,128.
MLA	Liu, CS,et al."Multilayer CNx/TiN composite films prepared by multi-are assisted DC reactive magnetron sputtering".SURFACE & COATINGS TECHNOLOGY 128(2000).

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