A simulator for producing of high flux atomic oxygen beam by using ECR plasma source

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	A simulator for producing of high flux atomic oxygen beam by using ECR plasma source
	S. W. Duo ; M. S. Li ; Y. M. Zhang
刊名	Journal of Materials Science & Technology
	2004
卷号	20 期号:6 页码:759-762
关键词	atomic oxygen low earth orbit space environment ECR plasma microwave surfaces erosion
ISSN号	1005-0302
中文摘要	In order to study the atomic oxygen corrosion of spacecraft materials in low earth orbit environment, an atomic oxygen simulator was established. In the simulator, a 2.45 GHz microwave source with maximum power of 600 W was launched into the circular cavity to generate ECR (electron cyclotron resonance) plasma. The oxygen ion beam moved onto a negatively biased Mo plate under the condition of symmetry magnetic mirror field confine, then was neutralized and reflected to form oxygen atom beam. The properties of plasma density, electron temperature, plasma space potential and ion incident energy were characterized. The atomic oxygen beam flux was calibrated by measuring the mass loss rate of Kapton during the atomic oxygen exposure. The test results show that the atomic oxygen beam with flux Of 10(16)similar to10(17) atoms(.)cm(-2.)s(-1) and energy of 5similar to30 eV and a cross section of phi80 mm could be obtained under the operating pressure of 10(-1)similar to10(-3) Pa. Such a high flux source can provide accelerated simulation tests of materials and coatings for space applications.
原文出处	://WOS:000225623300033
公开日期	2012-04-14
内容类型	期刊论文
源URL	[http://ir.imr.ac.cn/handle/321006/35354]
专题	金属研究所_中国科学院金属研究所
推荐引用方式 GB/T 7714	S. W. Duo,M. S. Li,Y. M. Zhang. A simulator for producing of high flux atomic oxygen beam by using ECR plasma source[J]. Journal of Materials Science & Technology,2004,20(6):759-762.
APA	S. W. Duo,M. S. Li,&Y. M. Zhang.(2004).A simulator for producing of high flux atomic oxygen beam by using ECR plasma source.Journal of Materials Science & Technology,20(6),759-762.
MLA	S. W. Duo,et al."A simulator for producing of high flux atomic oxygen beam by using ECR plasma source".Journal of Materials Science & Technology 20.6(2004):759-762.