Microstructure and magnetic properties of anisotropic Nd-Fe-B thin films fabricated with different deposition rates | |
S. L. Chen ; W. Liu ; Z. D. Zhang | |
刊名 | Journal of Magnetism and Magnetic Materials
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2006 | |
卷号 | 302期号:2页码:306-309 |
关键词 | thin film NdFeB crystalline texture structure and magnetic properties |
ISSN号 | 0304-8853 |
中文摘要 | Anisotropic Nd-Fe-B thin films with c-axis texture are fabricated by DC magnetron sputtering on heated Si substrates. The influences of deposition rate (DR) on the microstructure and magnetic properties of Nd-Fe-B thin films are investigated. It is found that the atomic ratio of Nd/Fe in Nd-Fe-B thin films is sensitive to DR, hence resulting in a change in magnetic properties. With increasing DR, the Nd/ Fe atomic ratio increases monotonically. For the films sputtered at low DRs (<= 0.5 nm/s), low coercivities are observed due to the existence of alpha-Fe or an absence of Nd-rich phase. Further increasing the DR (>=,0.6 tim/s) results in a significant increase of coercivity Lip to 14.5 kOe, because the hard-magnetic Nd2Fe14B phase coexists with the Nd-rich phase in the films. Size of the surface grains increases with increasing DR, and for the films prepared at a high DR (>= 0.6 nm/s), some island-like big grains appear on the film surface, which are correlated with the Nd-rich phase. (c) 2005 Elsevier B.V. All rights reserved. |
原文出处 | |
公开日期 | 2012-04-13 |
内容类型 | 期刊论文 |
源URL | [http://ir.imr.ac.cn/handle/321006/34152] ![]() |
专题 | 金属研究所_中国科学院金属研究所 |
推荐引用方式 GB/T 7714 | S. L. Chen,W. Liu,Z. D. Zhang. Microstructure and magnetic properties of anisotropic Nd-Fe-B thin films fabricated with different deposition rates[J]. Journal of Magnetism and Magnetic Materials,2006,302(2):306-309. |
APA | S. L. Chen,W. Liu,&Z. D. Zhang.(2006).Microstructure and magnetic properties of anisotropic Nd-Fe-B thin films fabricated with different deposition rates.Journal of Magnetism and Magnetic Materials,302(2),306-309. |
MLA | S. L. Chen,et al."Microstructure and magnetic properties of anisotropic Nd-Fe-B thin films fabricated with different deposition rates".Journal of Magnetism and Magnetic Materials 302.2(2006):306-309. |
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