Microstructure and magnetic properties of anisotropic Nd-Fe-B thin films fabricated with different deposition rates

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	Microstructure and magnetic properties of anisotropic Nd-Fe-B thin films fabricated with different deposition rates
	S. L. Chen ; W. Liu ; Z. D. Zhang
刊名	Journal of Magnetism and Magnetic Materials
	2006
卷号	302 期号:2 页码:306-309
关键词	thin film NdFeB crystalline texture structure and magnetic properties
ISSN号	0304-8853
中文摘要	Anisotropic Nd-Fe-B thin films with c-axis texture are fabricated by DC magnetron sputtering on heated Si substrates. The influences of deposition rate (DR) on the microstructure and magnetic properties of Nd-Fe-B thin films are investigated. It is found that the atomic ratio of Nd/Fe in Nd-Fe-B thin films is sensitive to DR, hence resulting in a change in magnetic properties. With increasing DR, the Nd/ Fe atomic ratio increases monotonically. For the films sputtered at low DRs (<= 0.5 nm/s), low coercivities are observed due to the existence of alpha-Fe or an absence of Nd-rich phase. Further increasing the DR (>=,0.6 tim/s) results in a significant increase of coercivity Lip to 14.5 kOe, because the hard-magnetic Nd2Fe14B phase coexists with the Nd-rich phase in the films. Size of the surface grains increases with increasing DR, and for the films prepared at a high DR (>= 0.6 nm/s), some island-like big grains appear on the film surface, which are correlated with the Nd-rich phase. (c) 2005 Elsevier B.V. All rights reserved.
原文出处	://WOS:000237009000008
公开日期	2012-04-13
内容类型	期刊论文
源URL	[http://ir.imr.ac.cn/handle/321006/34152]
专题	金属研究所_中国科学院金属研究所
推荐引用方式 GB/T 7714	S. L. Chen,W. Liu,Z. D. Zhang. Microstructure and magnetic properties of anisotropic Nd-Fe-B thin films fabricated with different deposition rates[J]. Journal of Magnetism and Magnetic Materials,2006,302(2):306-309.
APA	S. L. Chen,W. Liu,&Z. D. Zhang.(2006).Microstructure and magnetic properties of anisotropic Nd-Fe-B thin films fabricated with different deposition rates.Journal of Magnetism and Magnetic Materials,302(2),306-309.
MLA	S. L. Chen,et al."Microstructure and magnetic properties of anisotropic Nd-Fe-B thin films fabricated with different deposition rates".Journal of Magnetism and Magnetic Materials 302.2(2006):306-309.