Growth and characterization of Bi(2)Se(3) thin films by pulsed laser deposition using alloy target

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	Growth and characterization of Bi(2)Se(3) thin films by pulsed laser deposition using alloy target
	L. J. Meng ; H. Meng ; W. J. Gong ; W. Liu ; Z. D. Zhang
刊名	Thin Solid Films
	2011
卷号	519 期号:22 页码:7627-7631
关键词	Pulsed laser deposition Thin films Bismuth selenide X-ray diffraction Electrical properties and measurements Surface morphology Scanning electron microscopy Crystal microstructure optical-properties electrodeposition photoemission
ISSN号	0040-6090
中文摘要	Bi(2)Se(3) thin films were deposited on the (100) oriented Si substrates by pulsed laser deposition technique at different substrate temperatures (room temperature -400 degrees C). The effects of the substrate temperature on the structural and electrical properties of the Bi(2)Se(3) films were studied. The film prepared at room temperature showed a very poor polycrystalline structure with the mainly orthorhombic phase. The crystallinity of the films was improved by heating the substrate during the deposition and the crystal phase of the film changed to the rhombohedral phase as the substrate temperature was higher than 200 degrees C. The stoichiometry of the films and the chemical state of Bi and Se elements in the films were studied by fitting the Se 3d and the Bi 4d5/2 peaks of the X-ray photoelectron spectra. The hexagonal structure was seen clearly for the film prepared at the substrate temperature of 400 degrees C. The surface roughness of the film increased as the substrate temperature was increased. The electrical resistivity of the film decreased from 1 x 10(-3) to 3 x 10(-4) Omega cm as the substrate temperature was increased from room temperature to 400 degrees C. (C) 2011 Elsevier B.V. All rights reserved.
原文出处	://WOS:000295057000002
公开日期	2012-04-13
内容类型	期刊论文
源URL	[http://210.72.142.130/handle/321006/30593]
专题	金属研究所_中国科学院金属研究所
推荐引用方式 GB/T 7714	L. J. Meng,H. Meng,W. J. Gong,et al. Growth and characterization of Bi(2)Se(3) thin films by pulsed laser deposition using alloy target[J]. Thin Solid Films,2011,519(22):7627-7631.
APA	L. J. Meng,H. Meng,W. J. Gong,W. Liu,&Z. D. Zhang.(2011).Growth and characterization of Bi(2)Se(3) thin films by pulsed laser deposition using alloy target.Thin Solid Films,519(22),7627-7631.
MLA	L. J. Meng,et al."Growth and characterization of Bi(2)Se(3) thin films by pulsed laser deposition using alloy target".Thin Solid Films 519.22(2011):7627-7631.