A novel capacitive accelerometer with an eight-beam-mass structure by self-stop anisotropic etching of (100) silicon

	A novel capacitive accelerometer with an eight-beam-mass structure by self-stop anisotropic etching of (100) silicon
	Xiao, F ; Che, LF ; Xiong, B ; Wang, YL ; Zhou, XF ; Li, YF ; Lin, YL
刊名	JOURNAL OF MICROMECHANICS AND MICROENGINEERING
	2008
卷号	18 期号:6 Pages 页码:075005
公开日期	2012-05-12
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/108733]
专题	上海微系统与信息技术研究所_传感技术联合国家重点实验室_期刊论文
推荐引用方式 GB/T 7714	Xiao, F,Che, LF,Xiong, B,et al. A novel capacitive accelerometer with an eight-beam-mass structure by self-stop anisotropic etching of (100) silicon[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2008,18(6 Pages):075005.
APA	Xiao, F.,Che, LF.,Xiong, B.,Wang, YL.,Zhou, XF.,...&Lin, YL.(2008).A novel capacitive accelerometer with an eight-beam-mass structure by self-stop anisotropic etching of (100) silicon.JOURNAL OF MICROMECHANICS AND MICROENGINEERING,18(6 Pages),075005.
MLA	Xiao, F,et al."A novel capacitive accelerometer with an eight-beam-mass structure by self-stop anisotropic etching of (100) silicon".JOURNAL OF MICROMECHANICS AND MICROENGINEERING 18.6 Pages(2008):075005.