MICRO/NANO-FRICTION AND THERMAL-MECHANICAL PROPERTIES OF POLYMER THIN-FILM INVESTIGATED WITH AN INTEGRATED SPM PROBE ARRAY | |
Haifei Bao, Bin Liu and Xinxin Li | |
2007 | |
会议名称 | Transducers’07:The 14th International Conference on Solid-State Sensors, Actuators and Microsystems |
会议日期 | 2007 |
语种 | 英语 |
内容类型 | 会议论文 |
源URL | [http://ir.sim.ac.cn/handle/331004/107612] ![]() |
专题 | 上海微系统与信息技术研究所_传感技术联合国家重点实验室_会议论文 |
推荐引用方式 GB/T 7714 | Haifei Bao, Bin Liu and Xinxin Li. MICRO/NANO-FRICTION AND THERMAL-MECHANICAL PROPERTIES OF POLYMER THIN-FILM INVESTIGATED WITH AN INTEGRATED SPM PROBE ARRAY[C]. 见:Transducers’07:The 14th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. |
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